| 번호 | 제목 |
|---|---|
| 1 |
Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation after STI-CMP MOON Seung-Hyun, LEE Keun-Hoo, KIM Jun-Seok, KANG Hyun-Goo, PAIK Ungyu, PARK Jea-Gun 한국재료학회 2006년 봄 학술대회 |
| 번호 | 제목 |
|---|---|
| 1 |
Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation after STI-CMP MOON Seung-Hyun, LEE Keun-Hoo, KIM Jun-Seok, KANG Hyun-Goo, PAIK Ungyu, PARK Jea-Gun 한국재료학회 2006년 봄 학술대회 |