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Investigation and origin of abnormal small heptagonal-shape etch pits on PVT grown C-face 4H silicon carbide Myoungho Jeong, Dong Yeob Kim, Duy Khanh Tran, Soon-Ku Hong, Myoung-Chuel Chun, Won-Jae Lee, Tai-Hee Eun, Jeong Yong Lee 한국재료학회 2016년 가을 학술대회 |