| 학회 | 한국재료학회 |
| 학술대회 | 2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 | 16권 1호 |
| 발표분야 | C. Energy and the Environment(에너지 및 환경재료) |
| 제목 | Effect of Ag interlayer on the optoelectrical properties of TiON thin films with a magnetron sputtering at room temperature |
| 초록 | TiON/Ag/TiON (TAgT) thin films were deposited on glass substrates using RF and DC magnetron sputtering at room temperature. The thicknesses of each layer in the TAgT films were set at 50/5/45 nm. The optoelectrical properties of the TiON films were strongly influenced by the presence of an Ag interlayer. Although the optical transmittance of the film deteriorated when an Ag interlayer was added, the films had a low resistivity of 9x10-4 Ωcm . In addition, the TAgT films show work-functins of 4.4 eV, which are suitable for organic light emitting diode (OLED) applications. The experimental results mean that TiON films manufactured with a 5-nm thick Ag interlayer is an attractive candidate for use as a transparent electrode in large area electronic applications such as solar cells and displays. |
| 저자 | 김유성, 김대일, 정철우, 신창호, 허성보, 이학민 |
| 소속 | 울산대 |
| 키워드 | TiON; Ag; Transmittance; Sheet resistance; Sputter |
