| 초록 |
SnS thin films with different thicknesses were fabricated by sputtering method and their NO2 gas sensing properties were investigated at low operating temperatures. Physical and chemical properties of the material were thoroughly evaluated by various analytical tools of scanning electron microscopy, transmission electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Raman spectroscopy, and resistive measurement, thereby confirming the effect of the thickness and applied voltage on the gas-sensing performances. The results indicated that optimizing the thickness and the applied voltage are the effective ways to achieve the reversible and higher response of the SnS thin film, even at room temperature. However, the response level and response/recovery times of the sensor need to be further enhanced for real application. |
