화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2010년 봄 (04/08 ~ 04/09, 대전컨벤션센터)
권호 35권 1호
발표분야 고분자 합성
제목 Synthesis of branched polymer as ArF photoresist by reversible addition-fragmentation chain transfer (RAFT) polymerization
초록 Controlled/living radical polymerizations (CRPs) can make a product which has designed molecular weight, low molecular weight distribution and well defined structure. Especially uniform branched polymer can be made by CRP, due to the polymerization mechanism; simultaneous generation and growth of chains during polymerization. In this study, branched ArF photoresist was synthesized via reversible addition-fragmentation chain transfer (RAFT) polymerization, one of well-defined controlled/living radical polymerization. Three methacrylate monomers for lithographic functionalities, ethylene glycol dimethacrylate for branching site, and cyanopropyldithionaphthalate (CPDN) were components for this system. Characterizations of the product by GPC and 1H-NMR were done.
저자 손해성, 김동균, 이애리, 이종찬
소속 서울대
키워드 branched polymer; ArF photoresist; reversible addition fragmentation chain transfer; RAFT
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