| 초록 |
Transmission electron microscopy (TEM) has been being utilized in many fields, from physics, materials science, chemistry, to biomedicine researches. Over recent decades, the growth of TEM research has led to the development of In-situ TEM technique which enable the real-time observation of microscopic processes which occurs at the nano and atomic scales. Using the In-situ TEM technique, we can observe and record the microstructure changes and measure the properties of specimens during the experiment processes conducted inside the TEM. In-situ TEM tensile testing has been treated as a representative in-situ TEM work for elucidating the plastic deformation mechanism in inorganic materials. However, the conventional in-situ mechanical TEM technique has limitations related to the capability of controlling load or stain during tensile testing. Recently, a unique method for quantitative in situ nano tensile testing in a TEM was developed, employing focused ion beam (FIB) technique to fabricate the feature-controlled specimen and using miniature force transducers with precise capacitors or MEMS devices to make micro-N level load control or nanometer-level displacement control. Here, we introduce applications of the quantitative in situ tensile testing technique in the TEM, providing detailed quantitative analysis of the plastic behaviors of materials in micro/nano regime. |
