화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2011년 봄 (04/07 ~ 04/08, 대전컨벤션센터)
권호 36권 1호
발표분야 대학원생 구두발표
제목 Deterministic Nanotexturing by Directional Photofluidization Lithography
초록 Highly ordered, nanotextured surfaces have attracted a significant interest in nanoscale light manipulation (e.g., plasmonics). Herein, we demonstrate directional photofluidization lithography (DPL) as a new and simple method to fabricate the nanotextured surface with precisely controlled structural features (i.e., sizes, shapes, and orientations). The key part of DPL is the use of photo-reconfigurable polymers (i.e., azobenzene polymer) rather than conventional photoresist or thermoplastic polymers that have been used as a lithographic material. In particular, the photo-reconfigurable polymers used in this study showed the photofluidic movement only along the light polarization to be impinged onto polymer film, thus allowing the unprecedented flexibility in the control over nanostructural features. Furthermore, DPL ensures scalable, parallel, and cost-effective process, highly compatible with mass production.
저자 이승우, 이지혜, 강홍석, 강성욱, 박정기
소속 KAIST
키워드 Nanotexturing; Directional Photofluidization Lithography; Nanophotonics; Plasmonics; High Resolution Patterning
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