초록 |
Highly ordered, nanotextured surfaces have attracted a significant interest in nanoscale light manipulation (e.g., plasmonics). Herein, we demonstrate directional photofluidization lithography (DPL) as a new and simple method to fabricate the nanotextured surface with precisely controlled structural features (i.e., sizes, shapes, and orientations). The key part of DPL is the use of photo-reconfigurable polymers (i.e., azobenzene polymer) rather than conventional photoresist or thermoplastic polymers that have been used as a lithographic material. In particular, the photo-reconfigurable polymers used in this study showed the photofluidic movement only along the light polarization to be impinged onto polymer film, thus allowing the unprecedented flexibility in the control over nanostructural features. Furthermore, DPL ensures scalable, parallel, and cost-effective process, highly compatible with mass production. |