| 학회 |
한국고분자학회 |
| 학술대회 |
2008년 봄 (04/10 ~ 04/11, 컨벤션 뷰로(대전)) |
| 권호 |
33권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Microlithography using a 300-keV Ion Implanter |
| 초록 |
Thin polymer films were prepared by spin-coating of polymer solutions on a silicon wafer and baking. Ion irradiation was carried out with a 300-keV Ion implanter. The irradiated films were baked and developed to generate polymer patterns. The irradiated films were characterized by using FT-IR, XPS, and SEM. The well defined 40 μm square patterns were obtained. |
| 저자 |
최재학1, 이병민1, 권호제1, 김동기1, 정찬희1, 이정수1, 홍성권2, 노영창1, 서동학3
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| 소속 |
1한국원자력(연), 2충남대, 3한양대 |
| 키워드 |
microlithography; ion implanter; pattern; polymer
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| E-Mail |
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