| 학회 |
한국공업화학회 |
| 학술대회 |
2005년 봄 (05/13 ~ 05/14, 충남대학교) |
| 권호 |
9권 1호 |
| 발표분야 |
나노 |
| 제목 |
Fabrication and characterization of microfluidic channels using transparent polysilazane glass |
| 초록 |
In recent times, fabrication of MEMS using ceramic materials had received lot of attention due to their chemical inertness and high thermal stability. Polyorganosilazanes have been used extensively to prepare silicon based ceramics via polymer to ceramic transformation route. However, conversion of polysilazanes into useful inorganic and organic materials is a less explored area, especially for the preparation of ceramic microstructures; although thermal or photo cross-linking is an initial step in ceramic process. In the present work, the direct formation of bulk polysilazane solids by thermal and photo crosslinking of a commercially available polysilazane by various molding methods has been addressed. Also the feasibility of use of sets of so called soft lithography techniques has been explored to fabricate transparent polysilazane glass microfluidic channels. The optical transparency, solvent compatibility and thermal stability of transparent polysilazane microfludic channel have also been discussed. |
| 저자 |
아스타나 아밑, Jayakumar Perumal, 김동표
|
| 소속 |
충남대 |
| 키워드 |
microfluidic channels; transparent polysilazane glass
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| E-Mail |
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