| 초록 |
Herein, we report site-selective deposition of nano-features by using a nanoporous template of poly(vinyl alcohol) (PVA) fabricated by block copolymer(BCP)-based lithography. To produce hydrophilic nanoporous templates, a thin film of polystyrene-block-poly(2-vinyl pyridine) copolymer was spin-coated on the PVA layer and solvent-annealed in chloroform vapor for its microphase separation. By immersing the thin film into ethanol, the surface was reconstructed and nanopores were formed on the whole surface. Then, the nanoporous BCP thin film was utilized as an etching mask during oxygen plasma treatment. As the result, the nanoporous structures of the BCP thin films were transferred to the underlying PVA layer. Then BCP micelles dissolved in toluene were spin-coated on this PVA template. Consequently, the micelles spontaneously avoided the surface of PVA templates and self-assembled into nanopores selectively due to surface energy difference and height contrast. |
