화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2012년 가을 (10/11 ~ 10/12, 창원컨벤션센터)
권호 37권 2호
발표분야 분자전자 부문위원회
제목 Fabrication of TiO2 Nanotube Arrays Using Si-Containing Block Copolymer Lithography and Atomic Layer Deposition: Properties and Potential in Photovoltaic Devices
초록 Highly ordered freestanding TiO2 nanotube arrays with various wall thicknesses were fabricated by applying atomic layer deposition (ALD) to the nanoporous templates with high aspect ratios. The high thermal stability of the cross-linked organic template allowed high-temperature ALD. Easy removal of the organic template by a dry etch process followed by calcination produced vertically aligned and highly crystalline anatase TiO2 nanotube arrays without collapse or bundling. Furthermore, the ultrafine thickness tunability of the ALD process made it possible to develop TiO2 nanorods as well as nanotubes with different wall thicknesses. In addition the viability of TiO2 nanotube arrays deposited on indium tin oxide glass electrodes was studied for application in bulk heterojunction organic solar cells with radial electron contacts.
저자 조경천1, 정경옥2, 박창홍2, 권세훈3, 김진백1
소속 1한국과학기술원, 2KAIST, 3부산대
키워드 TiO2; Nano tube; Block Copolyemer; Atomic Layer Deposition; Solar Cell
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