| 학회 |
한국고분자학회 |
| 학술대회 |
2003년 가을 (10/10 ~ 10/11, 부경대학교) |
| 권호 |
28권 2호, p.61 |
| 발표분야 |
특별 심포지엄 |
| 제목 |
Transmission SAXS and GISAXS studies on the low-k thin films |
| 초록 |
Synchrotron X-ray scattering studies were carried out for nanoporous poly(methyl silsesquioxane) (PMSSQ) composites in thin films of a few hundreds nanometer thick, which were derived by both the curing reaction of the matrix component and the calcination reaction of the organic porogen component in blends of methyl silsesquioxane (MSSQ) precursor with different types of organic porogens: star-shaped poly(ε-caprolactone)s (four- and six-armed polymers: 4-PCL and 6-PCL). Measurements were carried out by conventional transmission SAXS(TSAXS) and grazing-incident SAXS (GISAXS). TSAXS and GISAXS patterns were measured at the DND-CAT beamline in APS and at 4C1 in PAL respectively. GISAXS patterns were analyzed based on the formalism of the distorted wave born approximation(DWBA) to deliver size, size distribution and overall content of pores in thin films. The effect of arm number will be discussed in details. |
| 저자 |
이병두1, 오원태2, 황용택3, 이문호1
|
| 소속 |
1포항공과대, 2기능성분자집합체연구센터, 3분자생명과학부BK21사업단 |
| 키워드 |
SAXS; GISAXS; low-k; thin film
|
| E-Mail |
|
