화학공학소재연구정보센터
학회 한국재료학회
학술대회 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔)
권호 22권 2호
발표분야 E. 환경/센서 재료 분과
제목 Gas sensing property of p-CuO/n-WO3 heterojunction thin films
초록 We report on the sensing properties of p-CuO/n-WO3 heterojunction thin film (C-W thin film) for improving efficient sensing of NO gas and indicating the insight into sensing mechanism of pn heterojunction effect. The C-W thin film was fabricated by sputtering method and thermal oxidation on patterned interdigital electrodes. The CuO catalytic material was controlled by changing the deposition time of sputter system as three kind of sensing layers. The sensing properties of the C-W thin films were investigated for typical oxidizing NO gas. At medium CuO-decorated density, the C-W thin film showed the highest NO sensing ability, superior to that of pristine n-WO3 thin film. The sensing mechanism of p-n C-W thin film is based on the catalytic and synergistic effects.
저자 Nguyen Duc Chinh1, Dojin Kim2, Dahye Kim1
소속 1Department of Materials Science and Engineering, 2Chungnam National Univ.
키워드 WO3 thin-film; gas sensing; p-n heterojunction; NO detection; sputtering method
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