| 학회 |
한국고분자학회 |
| 학술대회 |
2013년 봄 (04/11 ~ 04/12, 대전컨벤션센터) |
| 권호 |
38권 1호 |
| 발표분야 |
고분자구조 및 물성 |
| 제목 |
Comprehensive Synchrotron Grazing Incidence X-Ray Scattering Analysis of Nanostructures in Thin Films |
| 초록 |
Grazing incidence X-ray scattering (GIXS) formula was derived for nanopores buried in a polymer dielectric thin film supported by a substrate. By using the full power of the scattering formula, the experimental data from a model nanoporous system, nanoporous polymethylsilsesquioxane thin films, were successfully analyzed to obtain the pores’ form factor and size distribution, the film thickness, the absorption term, and the surface roughness, as well as film properties. The nanopores were found to be spherical and had a certain level of size distribution but randomly dispersed in the film. |
| 저자 |
안병철1, 이문호1, 노예철1, 김영용1, 위동우1, 김종현1, 김창섭1, 윤진환2
|
| 소속 |
1포항공과대, 2동아대 |
| 키워드 |
grazing incidence x-ray scattering; independent term; cross term; nanopore
|
| E-Mail |
|
