| 학회 | 한국화학공학회 |
| 학술대회 | 2019년 봄 (04/24 ~ 04/26, 제주국제컨벤션센터) |
| 권호 | 25권 1호, p.811 |
| 발표분야 | 재료(Materials) |
| 제목 | A comparative theoretical study on molecular layer deposition (MLD) of alucone and indicone nanocomposite thin films |
| 초록 | Molecular layer deposition (MLD) is a method for depositing ultrathin organic and organic-inorganic hybrid thin films based on self-limiting surface reactions. Recently we demonstrated fabrication of “alucone (aluminum alkoxide)” thin film by MLD using Al(CH3)3 and hydroquinone (HQ) precursors [1]. Similarly, “indicone (indium alkoxide)” thin film was deposited by MLD using [1,1,1-trimethyl-N-(trimethylsilyl)-silanaminato]indium and HQ. To understand the chemical mechanism of deposition and vibrational characteristics of the thin films, density functional theory (DFT) calculations were used. The precursors were sequentially appended on the -CH3 moiety on Al or In-terminated surface. It is found that all half reaction of both MLD would be facile and spontaneous, while the reactivity of alucone is higher than indicone. In addition, shifts in the vibrational features in the experimental Fourier-transform infrared (FTIR) spectroscopy of the films are consistently reproduced in our calculations. [1] Applied Surface Science 458, 864-871, 2018. |
| 저자 | 드란티옥밴1, 이승환2, 백건호2, 이정훈2, 박진성2, 송봉근1 |
| 소속 | 1홍익대, 2한양대 |
| 키워드 | 재료 |
| 원문파일 | 초록 보기 |
