초록 |
Self-powered and real-time biosignal monitoring such as electrocardiogram, blood pressure, and pulse are imperative technology for detecting the early onset of cardiovascular disease and checking personal health status in the future Internet of Things (IoTs) era. Conventional pressure sensors have an adequate performances to detect vital signal of human, but cannot be easily accepted for continuous monitoring in daily modern life due to inevitable power consumption problem for operation the devices. In this research, we demonstrated a self-powered piezoelectric pressure sensor on ultrathin polyethylene terephthalate substrate (4.8 µm) via an inorganic-based laser lift off (ILLO) technique. This sensor shows a reasonable pressure sensitivity of 0.018 kPa-1 in the range from 1 to 30 kPa, rapid response time (~60 ms) and long term durability (~5,000 cycles). With the property of decreased bending rigidity by using ultrathin substrate, the sensor was conformally attached on human wrist and neck, allowing detect a radial and carotid artery signals, respiration, and movements of the trachea without any structural damages owing to its mechanically symmetric design. Finally, real-time monitoring of arterial pulse was accomplished by wireless data transmitting to smart phone for early stage diagnosis of cardiovascular diseases, which will be a promising tool in biomedical and healthcare industry. |