학회 | 한국화학공학회 |
학술대회 | 2010년 가을 (10/21 ~ 10/22, 대전컨벤션센터) |
권호 | 16권 2호, p.1978 |
발표분야 | 재료 |
제목 | Evaluation of Cu ELD solution using in situ transmittance measurement |
초록 | Though electroless deposition (ELD) solution has inevitable stability problem due to the coexistence of reactants, difficulties lie in the quantatifying of the stability. In the aspect of monitoring of solution reactivity, ex situ electrochemical methods have some drawbacks such as compulsive supplement of electrons or time consumption. In this study, in-situ transmittance measurement was suggested to evaluate the stability and the reactivity of Cu ELD solution. This method can monitor the relative transmittance of solution between irradiated and output signal of He-Ne laser. Those data gives the information about the degree of nanoparticles scattering that homogeneously or heterogeneously generated in solution, and help the real time interpretation on the solution status. It also has merits that it reflects the real ELD environment due to the injection of catalytic sites instead of supplyment of electrons. In this presentation, it will be discussed that the basic understanding of transmittance behavior and performance changes with compositions of reducing agents and complexing agents selected based on their functionality. |
저자 | 박경주, 임태호, 김명준, 김재정 |
소속 | 서울대 |
키워드 | ELD; reactivity; stability; in situ analysis |
VOD | VOD 보기 |
원문파일 | 초록 보기 |