| 학회 |
한국화학공학회 |
| 학술대회 |
1997년 가을 (10/24 ~ 10/25, 충남대학교) |
| 권호 |
3권 2호, p.3289 |
| 발표분야 |
재료 |
| 제목 |
자기응집막을 이용한 세라믹 박막 제조 |
| 초록 |
We here investigate the growth of silicon oxide thin films on self-assembled monolayers(SAMs) of nonionic surfactant on mica using contact angle measurement, x-ray diffraction (XRD)and atomic force microscopy (AFM). A major reason in using silicon oxide as the ceramic materialand mica as a substrate is respectively that silicon oxide materials are a particularly important classof cerarmics since most silicon semiconductor technology is based on the ability to form thin SiO2layers and that mica has convenience properties such as atomic size, smoother surface, low cost,and ease in cleaning. In this paper, we are presenting new results in the preparation of SAMs andtheir use as a well ordered media for the growth of SiO2 thin films.
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| 저자 |
조규진, 김선미, 문일식, 민경신, 아재석, 정경택, 설용건
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| 소속 |
순천대 |
| 키워드 |
Self-Assembled Arrays; Ceramic Thin Films
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| E-Mail |
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| 원문파일 |
초록 보기 |
