| 학회 |
한국공업화학회 |
| 학술대회 |
2011년 봄 (05/11 ~ 05/13, 제주국제컨벤션센터) |
| 권호 |
15권 1호 |
| 발표분야 |
고분자 |
| 제목 |
Synthesis of star-shaped copolymers with acid-cleavable cross-linkers for ArF photoresist by reversible addition-fragmentation chain transfer (RAFT) polymerization |
| 초록 |
We synthesized star-shaped copolymers for ArF photoresist which have acid-degradable cross-linkers via reversible addition-fragmentation chain transfer (RAFT) polymerization. The polymers have shown improved contrast in a photolithographic process. Two kinds of methacrylate monomers and cyanopropyldithionaphthalate (CPDN) as a chain transfer agent (CTA) were used. 2,5-dimethyl-2,5-hexanediol dimethacrylate (t-DMA) was also used as the cross-linker. The resulting polymers were investigated by 1H-NMR, GPC, and thermal analyses. |
| 저자 |
이애리1, 손해성1, 김동균1, 이재우2, 김정식2, 김재현2, 이종찬1
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| 소속 |
1서울대, 2동진쎄미켐 |
| 키워드 |
RAFT; ArF photoresist; Star-shaped polymer; Acid-cleavable cross-linker
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| E-Mail |
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