| 학회 |
한국재료학회 |
| 학술대회 |
2019년 가을 (10/30 ~ 11/01, 삼척 쏠비치 호텔&리조트) |
| 권호 |
25권 2호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
A study on ZnO nanostructure for Hydrogen MOS sensor according to buffer layer deposition condition |
| 초록 |
According to increasing the research of use H2 as Energy, sensing H2 gas is important part of safety when we try to using H2 as energy. In this poster, we study ZnO nanostructure for H2 MOS sensor according to buffer layer deposition. First we optimized ZnO deposition condition on Alumina by atomic layer deposition method. And we deposited ZnO nanoneedle on Alumina heating module to make the MOS structure H2 gas sensor. To observe the characteristic of ZnO H2 gas sensor, we measured sensibility, resistance, and ZnO surface by scanning electron microscope(SEM), X-ray diffraction(XRD). |
| 저자 |
안민주, 정우섭, 조승희, 심규연, 강성호, 변동진
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| 소속 |
고려대 |
| 키워드 |
gas sensor; ZnO
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| E-Mail |
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