초록 |
The more highly industrialized, the more energy is required. Among them, development of renewable energy is actively occurring. Of the various renewable energy sources, Li ion batteries are the most popular. Conventionally, the anode of a Li ion battery is mostly used as a carbon material, and Si is a representative substitute for an anode for a higher efficiency of a battery and a charging capacity. Si can store Li ions 10 times more theoretically than carbon. In addition, SnO, Sn, and Ge are also good candidates for carbon substitute materials. In order to increase the efficiency of these materials, many attempts have been made to roll up film-shaped materials. Unlike the conventional roll-up techniques, this study used a thermal evaporation method to deposit a sacrificial layer of NaCl. The Si film and an electrode, and a supporting layer using e-beam evaporation. All deposition was carried out in-situ process. Using NaCl as a sacrificial layer, a simple method of separating Si film using water instead of a hazardous solution such as acetone or acid was used. As roll-up method, We attempted hand roll-up by the surround force field (eg, surface tension, triboelectric attraction, etc.), or adjusting the self-roll up by the stress of the Si film or supporting layer. |