| 초록 |
Self-assembly in block-copolymers (BCPs) has great promise for use in nanolithography and assembly of nanomaterials, with demonstrated capabilities in fabrication of nanoscale devices. For the practical applications, the rapid, high-resolution method for patterning BCPs with different molecular weights and compositions across a wafer surface, with complex geometries and diverse feature sizes are required. In here, we fabricated the diverse patterns of BCPs based on poly(styrene-block-methyl methacrylate) with various molecular weights and compositions by using electrohydrodynamics jet priting technique. The printed geometries involved diameters and linewidths into the sub-500 nm range, line edge roughness as small as ~45 nm, and with thickness uniformity and repeatability that can approach molecular length scales (~2 nm). Upon thermally annealing on bare or on chemically or topographically structured substrates, such printed patterns yielded nanodomains of BCPs in well-defined sizes, periodicities and orientations, with overall layouts that span dimensions from nanometers, with sizes continuously tunable between 13 nm and 20 nm, to centimeters. |
