검색결과 : 1건
No. | Article |
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1 |
Semiconductor on glass photocathodes for high throughput maskless electron beam lithography Baum AW, Schneider JE, Pease RFW, McCord MA, Spicer WE, Costello KA, Aebi VW Journal of Vacuum Science & Technology B, 15(6), 2707, 1997 |