검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dry-Etching of InGaP and Alinp in CH4/H-2/Ar Lee JW, Pearton SJ, Santana CJ, Lambers ES, Abernathy CR, Hobson WS, Ren F Plasma Chemistry and Plasma Processing, 16(3), 365, 1996 |
| No. | Article |
|---|---|
| 1 |
Dry-Etching of InGaP and Alinp in CH4/H-2/Ar Lee JW, Pearton SJ, Santana CJ, Lambers ES, Abernathy CR, Hobson WS, Ren F Plasma Chemistry and Plasma Processing, 16(3), 365, 1996 |