검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effects of metal stacks and patterned metal profiles on the electromigration characteristics in super-thin AlCu interconnects for sub-0.13 mu m technology Lee MH, Kwon YM, Pyo SG, Lee HC, Han JW, Paik KW Thin Solid Films, 519(11), 3906, 2011 |
| 2 |
Interaction between gas rarefaction and metal ionization in ionized physical vapor deposition Rossnagel SM Journal of Vacuum Science & Technology B, 16(6), 3008, 1998 |
| 3 |
Spectroscopy of Jet-Cooled Almn and Trends in the Electronic-Structure of the 3D Transition-Metal Aluminides Behm JM, Morse MD Journal of Chemical Physics, 101(8), 6500, 1994 |