검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design Zhang YC, Ding YY, Christofides PD Chemical Engineering Research & Design, 147, 529, 2019 |
| 2 |
Microscopic modeling and optimal operation of thermal atomic layer deposition Ding YY, Zhang YC, Kim K, Tran A, Wu Z, Christofides PD Chemical Engineering Research & Design, 145, 159, 2019 |