| 1 |
Capacitance-voltage measurement technique as a tool for in situ characterization of electrochemical etching of silicon
Chandra S, Singh J
Journal of the Electrochemical Society, 146(3), 1206, 1999 |
| 2 |
Anisotropic etching of silicon crystals in KOH solution - Part III - Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates
Tellier CR
Journal of Materials Science, 33(1), 117, 1998 |
| 3 |
Analysis of KOH etching of (100) silicon on insulator for the fabrication of nanoscale tips
Yun MH, Burrows VA, Kozicki MN
Journal of Vacuum Science & Technology B, 16(5), 2844, 1998 |
| 4 |
Investigation of the Processes of Electron Injection During Dissolution of P-Si in Acidic Fluoride and Alkaline Media
Cattarin S, Peter LM, Riley DJ
Journal of Physical Chemistry B, 101(20), 4071, 1997 |
| 5 |
Etch-Stop Techniques for Micromachining
Collins SD
Journal of the Electrochemical Society, 144(6), 2242, 1997 |
| 6 |
Wettability of Polished Silicon-Oxide Surfaces
Thomas RR, Kaufman FB, Kirleis JT, Belsky RA
Journal of the Electrochemical Society, 143(2), 643, 1996 |
