검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Very High-Frequency Capacitively Coupled Discharges for Large-Area Processing Meyyappan M, Colgan MJ Journal of Vacuum Science & Technology A, 14(5), 2790, 1996 |
| No. | Article |
|---|---|
| 1 |
Very High-Frequency Capacitively Coupled Discharges for Large-Area Processing Meyyappan M, Colgan MJ Journal of Vacuum Science & Technology A, 14(5), 2790, 1996 |