검색결과 : 1건
No. | Article |
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1 |
Chemical evolution of target surfaces during RF magnetron sputtering and its effect on the performance of TCO films Wu JY, Wang ZH, Chen F, Shen Q, Zhang LM Applied Surface Science, 493, 665, 2019 |
No. | Article |
---|---|
1 |
Chemical evolution of target surfaces during RF magnetron sputtering and its effect on the performance of TCO films Wu JY, Wang ZH, Chen F, Shen Q, Zhang LM Applied Surface Science, 493, 665, 2019 |