검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Modelling boron diffusion in heavily implanted low-pressure chemical vapor deposited silicon thin films during thermal post-implantation annealing Abadli S, Mansour F Thin Solid Films, 517(6), 1961, 2009 |
| No. | Article |
|---|---|
| 1 |
Modelling boron diffusion in heavily implanted low-pressure chemical vapor deposited silicon thin films during thermal post-implantation annealing Abadli S, Mansour F Thin Solid Films, 517(6), 1961, 2009 |