검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Neutral Shadowing in Circular Cylindrical Trench Holes (Vol 14, 3492, 1996) Abrahamshrauner B, Chen WJ Journal of Vacuum Science & Technology B, 15(5), 1847, 1997 |
| 2 |
Etching Profiles and Neutral Shadowing in Long Trenches Abrahamshrauner B, Wang CD Journal of the Electrochemical Society, 143(2), 672, 1996 |
| 3 |
Neutral Shadowing in Circular Cylindrical Trench Holes Abrahamshrauner B, Chen WJ Journal of Vacuum Science & Technology B, 14(6), 3492, 1996 |
| 4 |
Analytic Models for Plasma-Assisted Etching of Semiconductor Trenches Abrahamshrauner B Journal of Vacuum Science & Technology B, 12(4), 2347, 1994 |