검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structure quality of high aspect ratio sub-micron polymer structures patterned at the electron storage ring ANKA Achenbach S, Mappes T, Mohr J Journal of Vacuum Science & Technology B, 22(6), 3196, 2004 |
| 2 |
Influence of developer temperature and resist material on the structure quality in deep x-ray lithography Pantenburg FJ, Achenbach S, Mohr J Journal of Vacuum Science & Technology B, 16(6), 3547, 1998 |