검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of AlN films for acoustic biosensors by deep oscillation magnetron sputtering: effect of bias voltage Melo-Maximo L, Lin J, Murillo AE, Salas O, Oliva-Ramirez J, Oseguera J, Garcia-Farrera B, Melo-Maximo D Thin Solid Films, 664, 83, 2018 |