검색결과 : 2건
No. | Article |
---|---|
1 |
Modeling HfO2 atomic layer chemical vapor deposition on blanket wafer, via, and trench structures using HfCl4/H2O Stout PJ, Adams V, Ventzek PLG Journal of Vacuum Science & Technology B, 24(5), 2372, 2006 |
2 |
Multivariable Controller Increased Mtbe Complex Capacity Robertson D, Payne D, Peterson TJ, Adams V, Oconnor D Hydrocarbon Processing, 76(3), 53, 1997 |