화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effects of moisture on Fowler-Nordheim characterization of thin silicon-oxide films
Peterson CA, Workman RK, Sarid D, Vermeire B, Parks HG, Adderton D, Maivald P
Journal of Vacuum Science & Technology A, 17(5), 2753, 1999
2 2-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large-Scale Integration Test Structures
Neubauer G, Erickson A, Williams CC, Kopanski JJ, Rodgers M, Adderton D
Journal of Vacuum Science & Technology B, 14(1), 426, 1996