검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fabrication of micromirrors with self-aligned metallization using silicon back-end-of-the-line processes Ponoth SS, Agarwal NT, Persans PD, Plawsky JL Thin Solid Films, 472(1-2), 169, 2005 |
| 2 |
Plasma silicon oxide-silica xerogel based planar optical waveguides Ponoth SS, Agarwal NT, Persans PD, Plawsky JL Journal of Vacuum Science & Technology B, 22(3), 902, 2004 |
| 3 |
Fabrication of controlled sidewall angles in thin films using isotropic etches Ponoth SS, Agarwal NT, Persans PD, Plawsky JL Journal of Vacuum Science & Technology B, 21(4), 1240, 2003 |