검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electrical properties and temperature-humidity studies of fluorocarbon films deposited from pentafluoroethane/argon plasmas Agraharam S, Hess DW, Kohl PA, Allen SAB Journal of the Electrochemical Society, 148(5), F102, 2001 |
| 2 |
Comparison of plasma chemistries and structure-property relationships of fluorocarbon films deposited from octafluorocyclobutane and pentafluoroethane monomers Agraharam S, Hess DW, Kohl PA, Allen SAB Journal of Vacuum Science & Technology B, 19(2), 439, 2001 |
| 3 |
Thermal stability of fluorocarbon films deposited from pentafluoroethane/argon plasmas Agraharam S, Hess DW, Kohl PA, Allen SAB Journal of the Electrochemical Society, 147(7), 2665, 2000 |
| 4 |
Plasma chemistry in fluorocarbon film deposition from pentafluoroethane/argon mixtures Agraharam S, Hess DW, Kohl PA, Allen SAB Journal of Vacuum Science & Technology A, 17(6), 3265, 1999 |