화학공학소재연구정보센터
검색결과 : 35건
No. Article
1 Decarbonation and Pore Structural Change of Ca-Solid Reactant for CaO/CO2 Chemical Heat Pump
Aihara M, Yoshii T, Shimazaki Y, Takeuchi T, Habuka H
Journal of Chemical Engineering of Japan, 41(6), 513, 2008
2 Etch rate and surface morphology of polycrystalline beta-silicon carbide using chlorine trifluoride gas
Habuka H, Oda S, Fukai Y, Fukae K, Takeuchi T, Aihara M
Thin Solid Films, 514(1-2), 193, 2006
3 Gas velocity influence on silicon surface organic contamination evaluated using quartz crystal microbalance
Habuka H, Tawada M, Takeuchi T, Aihara M
Journal of the Electrochemical Society, 152(11), G862, 2005
4 Heat balance evaluation for rapid thermal processing system design
Habuka H, Wada T, Sakurai T, Takeuchi T, Aihara M
Journal of the Electrochemical Society, 152(12), G924, 2005
5 Dominant rate process of silicon surface etching by hydrogen chloride gas
Habuka H, Suzuki T, Yamamoto S, Nakamura A, Takeuchi T, Aihara M
Thin Solid Films, 489(1-2), 104, 2005
6 Formation mechanism of local thickness profile of silicon epitaxial film
Habuka H, Fukaya S, Sawada A, Takeuchi T, Aihara M
Journal of Crystal Growth, 266(1-3), 327, 2004
7 Silicon etch rate using chlorine trifluoride
Habuka H, Sukenobu T, Koda H, Takeuchi T, Aihara M
Journal of the Electrochemical Society, 151(11), G783, 2004
8 Water motion in carrierless wet station
Habuka H, Kobayashi S, Kato M, Takeuchi T, Aihara M
Journal of the Electrochemical Society, 151(12), G814, 2004
9 Helicobacter pylori infection influences expression of genes related to angiogenesis and invasion in human gastric carcinoma cells
Kitadai Y, Sasaki A, Ito M, Tanaka S, Oue N, Yasui W, Aihara M, Imagawa K, Haruma K, Chayama K
Biochemical and Biophysical Research Communications, 311(4), 809, 2003
10 High-performance silicon etching using chlorine trifluoride gas
Habuka H, Koda H, Saito D, Suzuki T, Nakamura A, Takeuchi T, Aihara M
Journal of the Electrochemical Society, 150(8), G461, 2003