검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of bulk titanium for MEMS applications Parker ER, Thibeault BJ, Aimi MF, Rao MP, MacDonald NC Journal of the Electrochemical Society, 152(10), C675, 2005 |
| 2 |
High-aspect-ratio bulk micromachining of titanium Aimi MF, Rao MP, Macdonald NC, Zuruzi AS, Bothman DP Nature Materials, 3(2), 103, 2004 |