검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Direct die-to-database electron beam inspection of fused silica imprint templates Resnick DJ, Myron LJ, Thompson E, Hasebe T, Tokumoto T, Yan C, Yamamoto M, Wakamori H, Inoue M, Ainley E, Nordquist KJ, Dauksher WJ Journal of Vacuum Science & Technology B, 24(6), 2979, 2006 |
| 2 |
Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates Mancini DP, Gehoski KA, Ainley E, Nordquist KJ, Resnick DJ, Bailey TC, Sreenivasan SV, Ekerdt JG, Willson CG Journal of Vacuum Science & Technology B, 20(6), 2896, 2002 |
| 3 |
Inter and intramembrane resist critical dimension uniformity across a SCALPEL mask Nordquist K, Ainley E, Resnick DJ, Weisbrod E, Martin C, Engelstad R, Masnyj Z, Mangat P Journal of Vacuum Science & Technology B, 18(6), 3242, 2000 |