검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The Influence of Fluorine on Boron-Enhanced Diffusion in Silicon by Bf2+ Implantation Through Oxide During High-Temperature Rapid Thermal Anneal Wang LZ, Luo MS, Tseng HH, Ajuria SA Journal of the Electrochemical Society, 144(11), L298, 1997 |
| 2 |
Uniformity of the N2O Furnace Oxynitride Process for the Formation of Thin Tunnel Dielectrics Okada Y, Tabin PJ, Reid KG, Hegde RI, Ajuria SA Journal of the Electrochemical Society, 141(12), 3500, 1994 |