검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Fabrication and characterization of pedestal optical waveguides using TeO2-WO3-Bi2O3 thin film as core layer Camilo ME, Kassab LRP, Assumpcao TAA, Cacho VDD, Alayo MI Thin Solid Films, 571, 225, 2014 |
| 2 |
Structural investigation of Si-rich amorphous silicon oxynitride films Scopel WL, Fantini MCA, Alayo MI, Pereyra I Thin Solid Films, 425(1-2), 275, 2003 |
| 3 |
Silicon rich silicon oxynitride films for photoluminescence applications Ribeiro M, Pereyra I, Alayo MI Thin Solid Films, 426(1-2), 200, 2003 |
| 4 |
On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy films Alayo MI, Pereyra I, Scopel WL, Fantini MCA Thin Solid Films, 402(1-2), 154, 2002 |
| 5 |
Local structure and bonds of amorphous silicon oxynitride thin films Scopel WL, Fantini MCA, Alayo MI, Pereyra I Thin Solid Films, 413(1-2), 59, 2002 |
| 6 |
Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS Guimaraes MS, Sinatora A, Alayo MI, Pereyra I, Carreno MNP Thin Solid Films, 398-399, 626, 2001 |
| 7 |
Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures Alayo MI, Pereyra I, Carreno MNP Thin Solid Films, 332(1-2), 40, 1998 |