검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Formation of Nanoscale Cobalt Silicide and Gold Wires Using Electron-Beam and Chemically Enhanced Vapor Etching Allgair J, Rack MJ, Whidden TK, Kozicki MN, Ferry DK Journal of Vacuum Science & Technology A, 14(3), 1855, 1996 |
| 2 |
Catalyzed HF Vapor Etching of Silicon Dioxide for Microlithographic and Nanolithographic Masks Whidden TK, Allgair J, Ryan JM, Kozicki MN, Ferry DK Journal of the Electrochemical Society, 142(4), 1199, 1995 |
| 3 |
Nanoscale Scanning Tunneling Microscope Patterning of Silicon Dioxide Thin-Films by Catalyzed HF Vapor Etching Whidden TK, Allgair J, Jenkinsgray A, Kozicki MN Journal of Vacuum Science & Technology B, 13(3), 1337, 1995 |