화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 High mobility SiGe/Si transistor structures on sapphire substrates using ion implantation
Alterovitz SA, Mueller CH, Croke ET
Journal of Vacuum Science & Technology B, 22(4), 1776, 2004
2 Interface characterization of Si3N4/Si/GaAs heterostructures after high temperature annealing
Park DG, Wang ZH, Morkoc H, Alterovitz SA, Smith DJ, Tsen SCY
Journal of Vacuum Science & Technology B, 16(6), 3032, 1998
3 Multiple minima in the ellipsometric error function
Alterovitz SA, Johs B
Thin Solid Films, 313-314, 124, 1998
4 Gate Quality Si3N4 Prepared by Low-Temperature Remote Plasma-Enhanced Chemical-Vapor-Deposition for III-V Semiconductor-Based Metal-Insulator-Semiconductor Devices
Park DG, Tao M, Li D, Botchkarev AE, Fan Z, Wang Z, Mohammad SN, Rockett A, Abelson JR, Morkoc H, Heyd AR, Alterovitz SA
Journal of Vacuum Science & Technology B, 14(4), 2674, 1996
5 Applications of Variable-Angle Spectroscopic Ellipsometry to Strained SiGe Alloy Heterostructures
Heyd AR, Alterovitz SA, Croke ET, Wang KL, Lee CH
Thin Solid Films, 270(1-2), 91, 1995
6 Plasma-Deposited SiO2 for Planar Self-Aligned Gate Metal-Insulator-Semiconductor Field-Effect Transistors on Semiinsulating InP
Tabory CN, Young PG, Smith ED, Alterovitz SA
Journal of Vacuum Science & Technology B, 12(1), 130, 1994