검색결과 : 2건
No. | Article |
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1 |
Probe diagnostic development for electron beam produced plasmas Blackwell DD, Walton SG, Leonhardt D, Murphy DP, Fernsler RF, Amatucci WE, Meger RA Journal of Vacuum Science & Technology A, 19(4), 1330, 2001 |
2 |
Plasma diagnostics in large area plasma processing system Leonhardt D, Walton SG, Blackwell DD, Amatucci WE, Murphy DP, Fernsler RF, Meger RA Journal of Vacuum Science & Technology A, 19(4), 1367, 2001 |