화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Probe diagnostic development for electron beam produced plasmas
Blackwell DD, Walton SG, Leonhardt D, Murphy DP, Fernsler RF, Amatucci WE, Meger RA
Journal of Vacuum Science & Technology A, 19(4), 1330, 2001
2 Plasma diagnostics in large area plasma processing system
Leonhardt D, Walton SG, Blackwell DD, Amatucci WE, Murphy DP, Fernsler RF, Meger RA
Journal of Vacuum Science & Technology A, 19(4), 1367, 2001