검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of H-2 and Ar flow rates on the deposition of hydrogenated silicon thin films by an inductive coupled plasma-chemical vapor deposition system Li C, Hsieh JH, Huang KL, Shao YT, Chen YW Thin Solid Films, 544, 37, 2013 |