검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of additives on shape evolution during electrodeposition - III. Trench infill for on-chio interconnects Qin Y, Li XH, Xue F, Vereecken PM, Andricacos P, Deligianni H, Braatz RD, Alkire RC Journal of the Electrochemical Society, 155(3), D223, 2008 |
| 2 |
Effect of additives on shape evolution during electrodeposition - II. Parameter estimation from roughness evolution experiments Rusli E, Xue F, Drews TO, Vereecken PM, Andricacos P, Deligianni H, Braatz RD, Alkire RC Journal of the Electrochemical Society, 154(11), D584, 2007 |