검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
A mechanistic model for copper electropolishing in phosphoric acid Mendez J, Akolkar R, Andryushchenko T, Landau U Journal of the Electrochemical Society, 155(1), D27, 2008 |
| 2 |
Electrochemical planarization of copper surfaces with submicron features Chalupa R, Andryushchenko T, Han J, Ghosh T, Shankar S, Fischer P Journal of Vacuum Science & Technology A, 25(4), 1019, 2007 |
| 3 |
An evaluation of electrolytic repair of discontinuous PVD copper seed layers in damascene vias Sukamto JH, Webb E, Andryushchenko T, Reid J Journal of Applied Electrochemistry, 34(3), 283, 2004 |