검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The properties of TiN ultra-thin films grown on SiO2 substrate by reactive high power impulse magnetron sputtering under various growth angles Shayestehaminzadeh S, Tryggvason TK, Karlsson L, Olafsson S, Gudmundsson JT Thin Solid Films, 548, 354, 2013 |