검색결과 : 2건
No. | Article |
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1 |
An angular distribution function for the sputter-depositing atoms and general equations describing the initial thickness profile of a thin film deposited inside a via and trench by sputtering Kim CG, Lee WJ Thin Solid Films, 519(1), 74, 2010 |
2 |
실리콘 박막 태양전지 전면 전극용 ZnO : Al 투명전도막의 표면형상 및 산란광 특성 김영진, 조준식, 이정철, 왕진석, 송진수, 윤경훈 Korean Journal of Materials Research, 19(5), 245, 2009 |